| Title | Authors | Year | Link / Download |
|---|---|---|---|
| Privacy preserving amalgamated machine learning for process control | Wilfried Verachtert, Thomas J. Ashby, Imen Chakroun, Roel Wuyts, Sayantan Das, Sandip Halder, Philippe Leray | 2021 | Abstract Download |
| Subpixel image reconstruction using nonuniform defocused images |
Nguyen Hieu Thao, Oleg Soloviev, Jacques Noom, Michel Verhaegen | 2021 | Download |
| Data fusion by artificial neural network for hybrid metrology development | L.Penlap et al. | 2021 | Visit |
| Detection and correlation of yield loss induced by color resist deposition deviation with a deep learning approach applied to optical acquisitions | Thomas Alcaire, Delphine Le Cunff, Jean-Hervé Tortai, Sebastien Soulan, Victor Gredy, Maxime Templier, Mehdi Kessar, Raffaele Bianchini, Audrey Berthoud | 2021 | Visit Download |
| Virtual Metrology to Eliminate Test Wafers Measurements on Copper Electroplating Deposition | A. Doinychko, U. Amato, S. Raitsyn, S. Perna, F. Blundo, C. Genua, D. Vinciguerra, A. La Magna, A. Torres, A. Rosenbaum, M.-R. Amini, and P. Vasquez | 2021 | Download |
| TXRF/GIXRF high precision laboratory setup with high flux monochromatic sources | C. G. Fatuzzo, P. Hönicke, C. Caliri, A. G. Karydas and F. P. Romano | 2021 | Download |
| Convex combination of alternating projection and Douglas-Rachford operators for phase retrieval | Hieu Thao Nguyen, Oleg Soloviev and Michel Verhaegen | 2021 | Download |
| Identifying the type of line edge roughness using grazing-incidence X-ray fluorescence | Zanyar Salami, Anal a Fern andez Herrero, Anna Andrle, Philipp Honicke, and Victor Soltwisch | 2021 | — |
| Shape- and element-sensitive reconstruction of periodic nanostructures with grazingincidence X-ray fluorescence analysis and machine learning | Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert, Victor Soltwisch | 2021 | — |
| Dimensional and compositional reconstruction of ordered nanostructures | PTB, Imec and others | 2021 | — |
| An Interpretable Machine Learning Model for Fault Detection and Fault Diagnosis | Wei-Ting Yang, Valeria Borodin, Michel Juge, Agnès Roussy | 2021 | — |
| Out-Of-Control Detection In Semiconductor Manufacturing using One-Class Support Vector Machines | Ilham Rabhi, Agnès Roussy, Francois Pasqualini, Cyril Alegret | 2021 | Visit |
| Virtual metrology for semiconductor manufacturing: Focus on transfer learning | Rebecca Clain, Valeria Bodorin, Agnès Roussy | 2021 | Visit |
| On feature selection for virtual metrology | Oussama Djedidi, Valeria Borodin, Michel Juge, Agnès Roussy | 2021 | Visit |
| A feature Selection Approach for virtual metrology: Application to CMP process | Taki Eddine Korabi, Valeria Borodin, Michel Juge, Agnès Roussy | 2021 | Visit |
| Data fusion by artificial neural network for hybrid metrology development | L.Penlap et al | 2021 | Visit |
| Penalised robust estimators for sparse and high-dimensional linear models | Umberto Amato, Anestis Antoniadis, Italia De Feis & Irene Gijbels | 2020 | Download Visit |
| Spectroscopic Ellipsometry Imaging for Process Deviation Detection via Machine Learning Approach | Thomas Alcaire & al | 2020 | Download |
| Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films | Joao Resende & al | 2020 | Visit |
| Flexible correction of 3D non-linear drift in AFM measurements by data fusion | Johannes Degenhardt, Rainer Tutsch, Gaoliang Dai | 2020 | Download |
| Robust Classification of Intramuscular EMG Signals to Aid the Diagnosis of Neuromuscular Disorders | S. Jose, S. T. George, M. S. P. Subathra, V. S. Handiru, P. K. Jeevanandam, U. Amato and E. S. Suviseshamuthu | 2020 | — |
| Simulations of the ultra-fast kinetics in Ni-Si-C ternary systems under laser irradiation | Salvatore Sanzaro, Corrado Bongiorno, Paolo Badalà, Anna Bassi, Ioannis Deretzis,, Marius Enachescu, Giovanni Franco, Giuseppe Fisicaro, Patrizia Vasquez, Alessandra Alberti and Antonino La Magna | 2020 | — |
| Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures | Philipp Hönicke, Anna Andrle, Yves Kayser, Konstantin V Nikolaev, Jürgen Probst, Frank Scholze, Victor Soltwisch, Thomas Weimann, Burkhard Beckhoff | 2020 | Visit |
| Inter-diffusion, melting and reaction interplay in Ni/4H-SiC under excimer laser annealing | Salvatore Sanzaro, Corrado Bongiorno, Paolo Badalà, Anna Bassi, Giovanni Franco, Patrizia Vasquez, Alessandra Alberti, Antonino La Magna | 2020 | Visit |
| Modelling Ion Production inside an Electron Impact Ionizer for High-Vacuum Gas Analysis | Jurjen Emmelkamp, Freek Molkenboer, Herman Bekman, Jeroen van den Brink, Dagmar Wismeijer, Norbert Koster, Olaf Kievit, Henk Lensen | 2020 | Download |
| PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci Search | Easter S. Suviseshamuthu, Didier Allexandre, Umberto Amato, Biancamaria Della Vecchia, Guang H. Yu | 2020 | Visit |
| Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions | Umberto Amato, Anestis Antoniadis, Italia De Feis | 2020 | Visit |
