
Partner | Project Work Package | Form | Status | Publication Title | Authors | Year of Publishing | Link/PDF |
---|---|---|---|---|---|---|---|
AMU | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Similarity-based Brownian Motion Approach for Remaining Useful Life Prediction | Dima el Jamal, Bouchra Ananou, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton | 2021 | Visit |
AMU | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Combining Approaches of Brownian Motion and Similarity Principle to Improve the Remaining Useful Life Prediction | Dima el Jamal, Mohamed Al-Kharaz, Bouchra Ananou, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton | 2021 | Visit |
AMU | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data | Philip Tchatchoua, Guillaume Graton, Mustapha Ouladsine, Michel Juge | 2021 | Visit |
AMU | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Health Indicator for Batch Processes Based on SP-LASSO | Dima el Jamal, Bouchra Ananou, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton | 2022 | Visit |
AMU | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes | Dima el Jamal, Bouchra Ananou, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton | 2022 | Visit |
AMU | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Semiconductor Multivariate Time-Series Anomaly Classification Based on Machine Learning Ensemble Techniques | Samia Mellah, Youssef Trardi, Guillaume Graton, Bouchra Ananou, El Mostafa El Adel, Mustapha Ouladsine | 2022 | |
AMU | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | 1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing | Philip Tchatchoua, Guillaume Graton, Mustapha Ouladsine, Julien Muller, Abraham Traore, Michel Juge | 2022 | Visit |
AMU | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Ensemble Machine Learning Algorithms for Anomaly Detection in Multivariate Time-Series | Youssef Trardi; Bouchra Ananou; Philip Tchatchoua; Mustapha Ouladsine | 2022 | Visit |
AVL | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Privacy preserving amalgamated machine learning for process control | Wilfried Verachtert, Thomas J. Ashby, Imen Chakroun, Roel Wuyts, Sayantan Das, Sandip Halder, Philippe Leray | 2021 | Available |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | Predictive virtual processes, metrology and maintenance in power device manufacturing | Antonino La Magna (CNR), Ioannis Deretzis (CNR), Umberto Amato (CNR), Daniele Pagano (ST-I), Patrizia Vasquez (ST-I), Anastasiia Doinychko (MENTOR), Andrea Calimera (POLITO), Alex Rosenbaum (MELLANOX), Marius Enachescu (UPB). | 2022 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | Penalised robust estimators for sparse and high-dimensional linear models | Umberto Amato, Anestis Antoniadis, Italia De Feis & Irene Gijbels | 2020 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | Robust Classification of Intramuscular EMG Signals to Aid the Diagnosis of Neuromuscular Disorders | S. Jose, S. T. George, M. S. P. Subathra, V. S. Handiru, P. K. Jeevanandam, U. Amato and E. S. Suviseshamuthu | 2020 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | Simulations of the ultra-fast kinetics in Ni-Si-C ternary systems under laser irradiation | Salvatore Sanzaro, Corrado Bongiorno, Paolo Badalà, Anna Bassi, Ioannis Deretzis,, Marius Enachescu, Giovanni Franco, Giuseppe Fisicaro, Patrizia Vasquez, Alessandra Alberti and Antonino La Magna | 2021 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | Inter-diffusion, melting and reaction interplay in Ni/4H-SiC under excimer laser annealing | Salvatore Sanzaro, Corrado Bongiorno, Paolo Badalà, Anna Bassi, Giovanni Franco, Patrizia Vasquez, Alessandra Alberti, Antonino La Magna | 2021 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci Search | Easter S. Suviseshamuthu, Didier Allexandre, Umberto Amato, Biancamaria Della Vecchia, Guang H. Yu | 2020 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions | Umberto Amato, Anestis Antoniadis, Italia De Feis | 2020 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | Penalized wavelet estimation and robust denoising for irregular spaced data | U. Amato, A. Antoniadis, I. De Feis, I. Gijbels | 2021 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | Wavelet-based robust estimation and variable selection in nonparametric additive models | U. Amato, A. Antoniadis, I. De Feis, I. Gijbels | 2021 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | TXRF/GIRXF high precision laboratory setup with high flux monochromatic sources for archeometric applications | Claudia G. Fatuzzo (CNR), Philipp Hönicke (PTB), Claudia Caliri (CNR), Andreas Karydas (NCSR) and Francesco Paolo Romano (CNR) | 2021 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | Multiscale simulations of plasma etching in silicon carbide structures | Markus Italia (CNR), Ioannis Deretzis (CNR), Silvia Scalese (CNR), A.La Magna (CNR), M.Pirnaci (ST-I), D.Pagano (ST-I), Dario Tenaglia (ST-I), P.Vasquez (ST-I) | 2021 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | TXRF/GIRXF high precision laboratory setup with high flux monochromatic sources | Claudia G. Fatuzzo (CNR), Philipp Hönicke (PTB), Claudia Caliri (CNR), Roberta Ricciari (ST-I), Daniele Pagano (ST-I), Andreas G. Karydas (CNR), Francesco Paolo Romano (CNR) | 2022 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | TXRF/GIRXF high precision laboratory setup with high flux monochromatic source | Claudia G. Fatuzzo (CNR), Philipp Hönicke (PTB), Claudia Caliri (CNR), Giulia Privitera (CNR), Roberta Ricciari (ST-I), Daniele Pagano (ST-I), Andreas G. Karydas (CNR), Patrizia Vasquez4(ST-I), Francesco Paolo Romano (CNR) | 2021 | Visit |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation + Peer-reviewed paper | Published | Multi-branch neural network for hybrid metrology improvement | Paul Digraci & al. | 2022 | Visit |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Submitted | Efficient rigorous coupled-wave analysis simulation of Mueller matrix ellipsometry of three-dimensional multilayer nanostructures | Hoang Lam Pham & al. | 2022 | Available |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | On the Fly Ellipsometry Imaging for Process Deviation Detection | Thomas Alcaire & al. | 2022 | Visit |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | New Industry 4.0 metrology approaches driven by predictive in line control requirements : At the frontier between academic studies and industrial world | Bernard Pelissier & al. , SEMI SUBMIT, February 2021, online event | 2021 | Available |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | Raman spectroscopy and ellipsometry hybridization: application to GeSbTe crystallization measurement for in line control | Jon De Vecchy & al. , ECASIA 2022, Limerick Ireland | 2021 | Available |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | Hybridisation of ellipsometry and XPS energy loss : robust bandgap and broadband optical constants determination of thin films | Théo Levert & al. , JNSPE 2022 , Dijon France | 2021 | Available |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | Go faster for process control : Enhanced sensitivity of ellipsometry imaging for deviation detection | Jean Hervé Tortai & al. , SEMICON Europa 2021, Munich Germany | 2021 | Available |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation + Peer-reviewed paper | Published | Data fusion by artificial neural network for hybrid metrology development | Lucien Penlap & al. | 2021 | Visit |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Submitted | Hybridization of ellipsometry and XPS energy loss: robust band gap and broadband optical constants determination of SiGe, HfON and MoOx thin films | Theo Levert & al. , | 2021 | |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation + Peer-reviewed paper | Published | Detection and correlation of yield loss induced by color resist deposition deviation with a deep learning approach applied to optical acquisitions | Thomas Alcaire & al. | 2021 | Visit |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation + Peer-reviewed paper | Published | Spectroscopic Ellipsometry Imaging for Process Deviation Detection via Machine Learning Approach | Thomas Alcaire & al | 2020 | Visit |
CNRS LTM | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films | Joao Resende & al | 2020 | Visit |
IMT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Published | A hybrid feature selection approach for virtual metrology: Application to CMP process | T.KorabiI,V.Borodin, M. Juge, A.Roussy | 2021 | ASMC 2021 IEEE |
IMT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Published | On feature selection for virtual metrology | O.Djedidi,V.Borodin, M. Juge, A.Roussy | 2021 | IEEE CASE 2021 |
IMT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Published | Virtual metrology for semiconductor manufacturing: Focus on transfer learning | R.Clain,V.Borodin, M. Juge, A.Roussy | 2021 | APCM 2021 |
IMT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Published | Virtual Metrology: a state of the art review | R.Clain,V.Borodin, M. Juge, A.Roussy | 2021 | IEEE CASE 2021 |
IMT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Submitted | Feature Selection for Virtual Metrology Modeling:An application to Chemical Mechanical Polishing | O.Djedidi, R.Clain, V.Borodin, A.Roussy | 2022 | ASMC 2022 |
IMT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Submitted | On Updating a Virtual Metrology Model in Semiconductor Manufacturing via Transfer Learning | R.Clain, I. Azzizi, V.Borodin, A.Roussy | 2022 | ASMC 2022 |
IMT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Submitted | Distance analysis in support of transfer Learning for Virtual Metrolgy | R.Clain, V.Borodin, A.Roussy | 2022 | ENBIS 2022 |
IMT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Submitted | An Interpretable Unsupervised Bayesian Network Model for Fault Detection and Diagnosis | WT.Yang, M.Reis, V.Borodin, A.Roussy | 2022 | control engineering practice |
Ippon Innovation | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | Chasing Abnormalities on Time Series for Predictive Maintenance and Advanced Process Control | C. Girou, F. Bergeret, D. Pagano, P. Vasquez, G. Prinzivalli, G. Tochino | 2022 | Visit |
Nearfield Instruments | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | High-NA EUV photoresist metrology using high-throughput scanning probe microscopy | M. Mucientes, A. Khachaturiants, R. Trussell, A. Kalinin, Y. Guo, E. C. Simons, S. Kim, O. Nadyarnykh, A. Moussa, J. Bogdanowicz, J. Severi, G. Lorusso, D. De Simone, A.-L. Charley, P. Leray, M. E. van Reijzen, C. Bozdog, H. Sadeghian | 2022 | Visit |
OCTO TECHNOLOGY | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Dimensionality reduction to improve search time and memory footprint in content-retrieval tasks: application to semiconductor inspection images | Thomas Vial, Farah Dhouib, Louison Roger, Annabelle Blangero, Frédéric Duvivier, Karim Sayadi, Marisa N. Faraggi | 2022 | Visit |
PTB | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures | Philipp Hönicke, Anna Andrle, Yves Kayser, Konstantin V Nikolaev, Jürgen Probst, Frank Scholze, Victor Soltwisch, Thomas Weimann, Burkhard Beckhoff | 2020 | Available |
PTB | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | Analysis of Line-Edge Roughness Using EUV Scatterometry | A. Fernandez Herrero, F. Scholze, G. Dai, V. Soltwisch | ||
ST-I | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Other publication | Published | Ni-silicide ohmic contacts on 4H-SiC formed by multi pulse excimer laser annealing | P. Badalà, I. Deretzis, S. Sanzaro, C. Bongiorno, G. Fisicaro, S. Rascunà, G. Bellocchi, A. Bassi, M. Boscaglia, D. Pagano, P: Vasquez, M. Enachescu, A. Alberti, A. La Magna | 2022 | Visit |
ST-I | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Peer-reviewed paper | Published | Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging | Jacopo Frascaroli*, Isabella Mica*, Marta Tonini*, Selene Colombo*, Luisito Livellara* Roberto Fumagalli^, Viktor Samu^, Máté Nagy^, Gábor Molnár^, Áron Horváth^, Zoltán Bartal^, Zoltán Kiss^, Tamás Sipőcz^ | 2022 | Visit |
ST-I | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | Chasing Abnormalities on Time Series for Predictive Maintenance and Advanced Process Control | C. Girou, F. Bergeret, D. Pagano, P. Vasquez, G. Prinzivalli, G. Tochino | 2022 | Visit |
ST-I | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Submitted | |||||
ST-I | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | Structural and electrical characterization of Ni-based ohmic contacts on 4H-SiC formed by solid-state laser annealing | Paolo Badalà (ST-I), Emanuele Smecca (CNR), Simone Rascunà (ST-I), Corrado Bongiorno (CNR), Egidio Carria (ST-I), Anna Bassi (ST-I), Gabriele Bellocchi (ST-I), Cristina Tringali (ST-I), Antonino La Magna (CNR) and Alessandra Alberti (CNR) | 2021 | Visit |
TNO | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Published | MFIG – a Mass Filtered Ion Gauge | Herman Bekman, Thomas Mechielsen, Dorus Elstgeest, Jurjen Emmelkamp, YouyouWestland, Freek Molkenboer, Norbert Koster, Henk Lensen | 2022 | Available |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | Closed-loop active object recognition with constrained illumination power | Oleg Soloviev,Jacques Noom, Michel Verhaegen | 2022 | Closed-loop active object recognition with constrained illumination power |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | Increase of wafer inspection tool throughput with computational imaging | Oleg Soloviev, Hieu Thao Nguyen, Jacques Noom, Michel Verhaegen | 2022 | Increase of wafer inspection tool throughput with computational imaging |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Planned | Subpixel image reconstruction using nonuniform defocused images | Nguyen Hieu Thao, Oleg Soloviev, Jacques Noom, Michel Verhaegen | 2021 | Visit |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | How innovations in methodology offer new prospects for volume electron microscopy | A.J. Kievits, R. Lane, E. C. Carroll, J. P. Hoogenboom | 2022 | Visit |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | Convex combination of alternating projection and Douglas–Rachford operators for phase retrieval | Nguyen Hieu Thao, Oleg Soloviev, Michel Verhaegen | 2021 | Visit |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | Projection methods for high numerical aperture phase retrieval | Nguyen Hieu Thao, Oleg Soloviev, Russell Luke, Michel Verhaegen | 2021 | Visit |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | Particle detection using closed-loop active model diagnosis | Jacques Noom, Oleg Soloviev, Carlas Smith, Hieu Thao Nguyen, Michel Verhaegen | 2022 | Visit |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | Closed-Loop Active Model Diagnosis Using Bhattacharyya Coefficient: Application to Automated Visual Inspection. | Noom, J., Thao, N.H., Soloviev, O., Verhaegen, M. | 2021 | Visit |
TU Delft | WP3 - Metrology platforms developments for enhanced productivity | Conference presentation | Published | Phase retrieval from overexposed PSF: a projection-based approach | Oleg Soloviev, Jacques Noom, Hieu Thao Nguyen, Gleb Vdovin, and Michel Verhaegen | 2022 | Visit |
TU/e | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Predictive discarding of wafers based on power leakage predictions from single layer misalignment data | Geert van Kollenburg, Mike Holenderski, Patrizia Vasquez, Nirvana Meratnia | 2022 | Visit |
TU/e | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Published | Value proposition of predictive discarding in semiconductor manufacturing | Geert van Kollenburg, Mike Holenderski, Nirvana Meratnia | 2022 | Visit |
PTB | WP3 - Metrology platforms developments for enhanced productivity | Other publication | Planned | Flexible correction of 3D non-linear drift in AFM measurements by data fusion | Johannes Degenhardt, Rainer Tutsch, Gaoliang Dai | 2020 | Available |
TNO | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Other publication | Submitted | Modelling Ion Production inside an Electron Impact Ionizer for High-Vacuum Gas Analysis | Jurjen Emmelkamp, Freek Molkenboer, Herman Bekman, Jeroen van den Brink, Dagmar Wismeijer, Norbert Koster, Olaf Kievit, Henk Lensen | 2020 | Available |
UPB | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | Pulsed Laser Deposition of SWCNTs on Carbon Fibres: Effect of Deposition Temperature | C.C. Moise, L. Rachmani, G.V. Mihai, O.A. Lazar, M. Enachescu, N. Naveh | 2021 | Visit |
UPB | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation | C.C. Moise, A. Pantazi, G.V. Mihai, A. Jderu, M. Bercu, A.A. Messina, M. Enachescu | 2021 | Visit |
UPB | WP3 - Metrology platforms developments for enhanced productivity | Peer-reviewed paper | Published | Electrodeposition of NiSn-rGO Composite Coatings from Deep Eutectic Solvents and Their Physicochemical Characterization | S.P. Rosoiu, A.G. Pantazi, A. Petica, A. Cojocaru, S. Costovici, C. Zanella, T. Visan, L. Anicai and M. Enachescu | 2020 | Visit |
ST-I | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | Virtual Metrology to Eliminate Test Wafers Measurements on Copper Electroplating Deposition | A. Doinychko, U. Amato, S. Raitsyn, S. Perna, F. Blundo, C. Genua, D. Vinciguerra, A. La Magna, A. Torres, A. Rosenbaum, M.-R. Amini, and P. Vasquez | 2021 | Visit |
CNR | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Conference presentation | Published | TXRF/GIXRF high precision laboratory setup with high flux monochromatic source | Claudia G. Fatuzzo, Philipp Hönicke, Claudia Caliri, Roberta Ricciari, Daniele Pagano, Andreas G. Karydas, Patrizia Vasquez, Francesco Paolo Romano | 2021 | Visit |
MENT | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Conference presentation | Published | A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization and control | Anastasiia Doinychko, Andres Torres, Ivan Kissiov, Melody Tao, Sanghyun Choi (Mentor - S-EDA) | 2022 | Visit |
ST-I | WP5 - Industry 4.0 digitization of manufacturing for enhanced productivity | Other publication | Published | Industry4.0 Productivity Improvement in Major EU Fabs | D. Pagano (ST-I) | 2022 | Visit |
TU/e | WP4 - Industry 4.0 predictive yield and tools performance pilot line for enhanced productivity | Peer-reviewed paper | Planned | Predictive discarding for sustainable Industry 5.0 | Geert van Kollenburg (TU/e), Mike Holenderski (TU/e), Nirvana Meratnia (TU/e), Daniele Pagano (ST-I), Patrizia Vasquez (ST-I) | 2022 | Visit |